Temperature Measurement during Millisecond Annealing - Ripple Pyrometry for Flash Lamp Annealers - Denise Reichel

Denise Reichel studies the delicate subject of temperature measurement during lamp-based annealing of semiconductors, in particular during flash lamp annealing. The approach of background-correction using amplitude-modulated light to obtain the sample reflectivity is reinvented from rapid thermal annealing to apply to millisecond annealing.